Rotary sputtering cathodes can form coatings of oxides etc. at a higher speed and have a higher usage rate of targets in comparison with conventional planar sputtering cathodes. By using rotary sputtering cathodes as dual-cathodes, target change-out frequencies can be drastically reduced.
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We produce backing tubes for rotary sputtering equipment. Supported materials include Ti and SUS.
Rotary sputtering targets also called rotable sputtering targets, or Rotating Sputtering targets, or tube sputtering targets, there are monolithic and bonding type and spray type.
Able Target is proud to announce its new range of Rotary sputtering targets.
The Rotary targets are produced by either plasma spraying onto a base tube or from solid pieces, Lengths of over mm are manufactured.
We also have melting and casting, Vacuum Sintering, Vacuum Spraying,and HIP processing method for our Rotary targets,almost covers all the rotating sputtering targets production method.
Complementing our advanced thermal spray capability, Able Target Limited have developed proprietary casting capability to manufacture select rotatable sputtering targets to meet high density and high purity specifications.
We can also customize length, thickness, and target shape to meet application specific configuration.
Relative density: >99% Purity: >99.5%&#;99.999%
Rotary sputtering target size: φ56~190mm L: 120~ mm
Plane sputtering target size: (30~)*(20~)*(4~25)mm
Our Rotable Sputtering Targets materials including :
ZnO,i-ZnO, AZO, TiOx, TZO, ZnAl,CuGa, ZrO2,WOx,NbOx, Al2O3, Cu, Al, Sn, ZnSn, InSn, ATO, CdTe, V,
NiCr, NiV, CrAl,CrAlSi, AlTi,AlSn, Cr, AlTi, Ti, Zr, Hf,Mo, MoNb, Inconiel, W, Ta, Nb, SiAl, Si, etc.
Ask for a Rotary Sputtering Targets brochure with production and packing details
At the meantime,we can produce customized size according to customer's requirement.
For more information, please visit rotary sputter target.
Contact us to discuss your requirements of alloy sputtering target. Our experienced sales team can help you identify the options that best suit your needs.